Belgirate, Italy, 28-30 September 2005 TEMPERATURE MEASUREMENT OF SUB-MICROMETRIC ICs BY SCANNING THERMAL MICROSCOPY
نویسندگان
چکیده
Surface temperature measurements were performed with a Scanning Thermal Microscope. We aim at proving an eventual sub-micrometric resolution of this metrology when using a wollaston wire probe of micrometric size. A dedicated CMOS device was designed with arrays of lines 0.35μm in size with 0.8 μm and 10μm periods. Integrated Circuits with or without a passivition layer were tested. To enhance sensitivity, the IC heat source was excited with an AC current. We show that the passivation layer spreads heat so that the lines are not distinguishable. Removing this layer allows us to distinguish the lines in the case of the 10μm period.
منابع مشابه
Preparation and Characterization of CoMn/TiO2 Catalysts for Production of Light Olefins
A series of x(Co, Mn)/TiO2 catalysts (x=2–12wt.%) containing 25%Co and 75%Mn were prepared by the co-impregnation method. All prepared catalysts have been tested in Fischer-Tropsch synthesis for production of C2-C4 olefins. It was found that the catalyst containing 8wt.%(Co,Mn)/TiO2 is an optimal catalyst for production of C...
متن کاملPolyester/SiO2 Nanocomposites: Gas Permeation, Mechanical, Thermal and Morphological Study of Membranes
Using of nanocomposite membranes composed of polymer and inorganic nanoparticles is a novel method to enhance gas separation performance. In this study, membranes were fabricated from polyester (PE) containing silica (SiO2) nanoparticles and gas permeation properties of the resulting membranes were investigated. Morphology of the membranes, SiO2 distribution a...
متن کاملSynthesis, characterization, of Fluorohydroxyapatite nanopowders by sol-gel processing
In this work, sol-gel processing was used to synthesize the fluorohydroxyapatite (nano-FHA, Ca10(PO4)6(OH)2−xFx) nanopowders. The advantages of the sol-gel method over other methods are precise control of composition, low processing temperature, and better homogeneity. Calcium nitrate tetrahydrate, phosphorous pentoxide and Tetrabuthylammon...
متن کاملSynthesis, characterization, of Fluorohydroxyapatite nanopowders by sol-gel processing
In this work, sol-gel processing was used to synthesize the fluorohydroxyapatite (nano-FHA, Ca10(PO4)6(OH)2−xFx) nanopowders. The advantages of the sol-gel method over other methods are precise control of composition, low processing temperature, and better homogeneity. Calcium nitrate tetrahydrate, phosphorous pentoxide and Tetrabuthylammon...
متن کاملThermal regeneration and decoking optimization of chlorinated platinum/alumina catalysts for the isomerization process
The samples of spent chlorinated Pt/Al2O3 catalysts that were used in the isomerization process were decoked at elevated temperatures under airflow and different oxygen concentrations. The surface of the catalyst was characterized by thermal gravimetric analysis, differential scanning calorimetry, Brunauer-Emmett-Teller analysis, attenuated total reflection fast Fourier in...
متن کامل